Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, focus projection magnification system with nano source. The imaging resolution is quantified common 2D test structures validated 3D applications by means of Fourier Shell Correlation. As representative examples from nowadays material research, show metallization processes multilayer integrated circuits, aging lithium battery electrodes, volumetric metallic sub-micrometer fillers composites. Thus, laboratory provides unique possibility to image non-destructively range 170–190 nanometers, even high-density materials.